修飾溼蝕刻藍寶石圖形化基板對用氧化鋁當緩衝層之氮化鎵磊晶之影響

標題:	修飾溼蝕刻藍寶石圖形化基板對用氧化鋁當緩衝層之氮化鎵磊晶之影響 Effect of Modifying Wet-etched Patterned Sapphire Substrate on GaN Epitaxial Behavior using AlN as buffer layer
作者:	藍元志吳耀銓 Lian, Yuan-Chi Wu, Yew-Chung 材料科學與工程學系所
關鍵字:	藍寶石基板;溼蝕刻;氮化鋁緩衝層;發光二極體;氮化鎵磊晶;sapphire;wet-etched;AlN buffer layer;LED;GaN epitaxy
公開日期:	2017
URI:	http://etd.lib.nctu.edu.tw/cdrfb3/record/nctu/#GT070451516 http://hdl.handle.net/11536/142752
Appears in Collections:	Thesis