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dc.contributor.author林儒政zh_TW
dc.contributor.author許鉦宗zh_TW
dc.contributor.author潘扶民zh_TW
dc.contributor.authorLin, Ru-Zhengen_US
dc.contributor.authorSheu, Jeng-Tzongen_US
dc.contributor.authorPan, Fu-Mingen_US
dc.date.accessioned2018-01-24T07:42:50Z-
dc.date.available2018-01-24T07:42:50Z-
dc.date.issued2018en_US
dc.identifier.urihttp://etd.lib.nctu.edu.tw/cdrfb3/record/nctu/#GT070081603en_US
dc.identifier.urihttp://hdl.handle.net/11536/142965-
dc.language.isozh_TWen_US
dc.subject奈米線zh_TW
dc.subject環繞式閘極zh_TW
dc.subject無接面電晶體zh_TW
dc.subject反轉式電晶體zh_TW
dc.subject矽奈米帶zh_TW
dc.subject區域焦耳熱zh_TW
dc.subject電漿增進原子層沉積zh_TW
dc.subject電漿輔助化學氣相沈積zh_TW
dc.subject選擇性沉積zh_TW
dc.subjectnanowire (NW)en_US
dc.subjectgate-all-around (GAA)en_US
dc.subjecttransistoren_US
dc.subjectjunctionless (JL)en_US
dc.subjectinversion mode (IM)en_US
dc.subjectsilicon nanobelten_US
dc.subjectlocalized Joule heatingen_US
dc.subjectplasma-enhanced atomic layer depositionen_US
dc.subjectplasma-enhanced chemical vapor depositionen_US
dc.subjectselective depositionen_US
dc.title矽奈米電子元件於生醫與氣體感測研究zh_TW
dc.titleStudy of Silicon Nano-electronic Devices as biosensor and gas sensoren_US
dc.typeThesisen_US
dc.contributor.department材料科學與工程學系奈米科技碩博士班zh_TW
Appears in Collections:Thesis


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