标题: | 矽奈米電子元件於生醫與氣體感測研究 Study of Silicon Nano-electronic Devices as biosensor and gas sensor |
作者: | 林儒政 許鉦宗 潘扶民 Lin, Ru-Zheng Sheu, Jeng-Tzong Pan, Fu-Ming 材料科學與工程學系奈米科技碩博士班 |
关键字: | 奈米線;環繞式閘極;無接面電晶體;反轉式電晶體;矽奈米帶;區域焦耳熱;電漿增進原子層沉積;電漿輔助化學氣相沈積;選擇性沉積;nanowire (NW);gate-all-around (GAA);transistor;junctionless (JL);inversion mode (IM);silicon nanobelt;localized Joule heating;plasma-enhanced atomic layer deposition;plasma-enhanced chemical vapor deposition;selective deposition |
公开日期: | 2018 |
URI: | http://etd.lib.nctu.edu.tw/cdrfb3/record/nctu/#GT070081603 http://hdl.handle.net/11536/142965 |
显示于类别: | Thesis |