标题: 矽奈米電子元件於生醫與氣體感測研究
Study of Silicon Nano-electronic Devices as biosensor and gas sensor
作者: 林儒政
許鉦宗
潘扶民
Lin, Ru-Zheng
Sheu, Jeng-Tzong
Pan, Fu-Ming
材料科學與工程學系奈米科技碩博士班
关键字: 奈米線;環繞式閘極;無接面電晶體;反轉式電晶體;矽奈米帶;區域焦耳熱;電漿增進原子層沉積;電漿輔助化學氣相沈積;選擇性沉積;nanowire (NW);gate-all-around (GAA);transistor;junctionless (JL);inversion mode (IM);silicon nanobelt;localized Joule heating;plasma-enhanced atomic layer deposition;plasma-enhanced chemical vapor deposition;selective deposition
公开日期: 2018
URI: http://etd.lib.nctu.edu.tw/cdrfb3/record/nctu/#GT070081603
http://hdl.handle.net/11536/142965
显示于类别:Thesis