矽奈米電子元件於生醫與氣體感測研究

完整後設資料紀錄

DC 欄位	值	語言
dc.contributor.author	林儒政	zh_TW
dc.contributor.author	許鉦宗	zh_TW
dc.contributor.author	潘扶民	zh_TW
dc.contributor.author	Lin, Ru-Zheng	en_US
dc.contributor.author	Sheu, Jeng-Tzong	en_US
dc.contributor.author	Pan, Fu-Ming	en_US
dc.date.accessioned	2018-01-24T07:42:50Z	-
dc.date.available	2018-01-24T07:42:50Z	-
dc.date.issued	2018	en_US
dc.identifier.uri	http://etd.lib.nctu.edu.tw/cdrfb3/record/nctu/#GT070081603	en_US
dc.identifier.uri	http://hdl.handle.net/11536/142965	-
dc.language.iso	zh_TW	en_US
dc.subject	奈米線	zh_TW
dc.subject	環繞式閘極	zh_TW
dc.subject	無接面電晶體	zh_TW
dc.subject	反轉式電晶體	zh_TW
dc.subject	矽奈米帶	zh_TW
dc.subject	區域焦耳熱	zh_TW
dc.subject	電漿增進原子層沉積	zh_TW
dc.subject	電漿輔助化學氣相沈積	zh_TW
dc.subject	選擇性沉積	zh_TW
dc.subject	nanowire (NW)	en_US
dc.subject	gate-all-around (GAA)	en_US
dc.subject	transistor	en_US
dc.subject	junctionless (JL)	en_US
dc.subject	inversion mode (IM)	en_US
dc.subject	silicon nanobelt	en_US
dc.subject	localized Joule heating	en_US
dc.subject	plasma-enhanced atomic layer deposition	en_US
dc.subject	plasma-enhanced chemical vapor deposition	en_US
dc.subject	selective deposition	en_US
dc.title	矽奈米電子元件於生醫與氣體感測研究	zh_TW
dc.title	Study of Silicon Nano-electronic Devices as biosensor and gas sensor	en_US
dc.type	Thesis	en_US
dc.contributor.department	材料科學與工程學系奈米科技碩博士班	zh_TW
顯示於類別：	畢業論文