研究電子顯微鏡技術應用在接觸窗缺陷分析

完整後設資料紀錄

DC 欄位	值	語言
dc.contributor.author	洪致先	zh_TW
dc.contributor.author	柯富祥	zh_TW
dc.contributor.author	Hung, Chih-Hsien	en_US
dc.contributor.author	Ko, Fu-Hsiang	en_US
dc.date.accessioned	2018-01-24T07:43:10Z	-
dc.date.available	2018-01-24T07:43:10Z	-
dc.date.issued	2016	en_US
dc.identifier.uri	http://etd.lib.nctu.edu.tw/cdrfb3/record/nctu/#GT070061328	en_US
dc.identifier.uri	http://hdl.handle.net/11536/143186	-
dc.language.iso	zh_TW	en_US
dc.subject	電子束檢測	zh_TW
dc.subject	缺陷	zh_TW
dc.subject	接觸窗	zh_TW
dc.subject	電子顯微鏡	zh_TW
dc.subject	Ebeam	en_US
dc.subject	defect	en_US
dc.subject	Via	en_US
dc.subject	Dark field	en_US
dc.subject	bright field	en_US
dc.subject	voltage contrast	en_US
dc.title	研究電子顯微鏡技術應用在接觸窗缺陷分析	zh_TW
dc.title	Application of Electron Microscope on Defect Analysis for Via	en_US
dc.type	Thesis	en_US
dc.contributor.department	工學院半導體材料與製程設備學程	zh_TW
顯示於類別：	畢業論文