完整後設資料紀錄
DC 欄位 | 值 | 語言 |
---|---|---|
dc.contributor.author | 洪致先 | zh_TW |
dc.contributor.author | 柯富祥 | zh_TW |
dc.contributor.author | Hung, Chih-Hsien | en_US |
dc.contributor.author | Ko, Fu-Hsiang | en_US |
dc.date.accessioned | 2018-01-24T07:43:10Z | - |
dc.date.available | 2018-01-24T07:43:10Z | - |
dc.date.issued | 2016 | en_US |
dc.identifier.uri | http://etd.lib.nctu.edu.tw/cdrfb3/record/nctu/#GT070061328 | en_US |
dc.identifier.uri | http://hdl.handle.net/11536/143186 | - |
dc.language.iso | zh_TW | en_US |
dc.subject | 電子束檢測 | zh_TW |
dc.subject | 缺陷 | zh_TW |
dc.subject | 接觸窗 | zh_TW |
dc.subject | 電子顯微鏡 | zh_TW |
dc.subject | Ebeam | en_US |
dc.subject | defect | en_US |
dc.subject | Via | en_US |
dc.subject | Dark field | en_US |
dc.subject | bright field | en_US |
dc.subject | voltage contrast | en_US |
dc.title | 研究電子顯微鏡技術應用在接觸窗缺陷分析 | zh_TW |
dc.title | Application of Electron Microscope on Defect Analysis for Via | en_US |
dc.type | Thesis | en_US |
dc.contributor.department | 工學院半導體材料與製程設備學程 | zh_TW |
顯示於類別: | 畢業論文 |