主動層厚度對可撓式基板上低溫多晶矽薄膜元件之影響

Title:	主動層厚度對可撓式基板上低溫多晶矽薄膜元件之影響 Effect of Active Layer Thickness on the Performance of LTPS TFTs on the Flexible Substrate
Authors:	趙玟雅吳耀銓 Chao, Wen-Ya 平面顯示技術碩士學位學程
Keywords:	薄膜電晶體;可撓式基板;雷射結晶;非晶矽;低溫多晶矽;主動層;TFT;LTPS;ELA;a-Si;p-Si;active layer
Issue Date:	2016
URI:	http://etd.lib.nctu.edu.tw/cdrfb3/record/nctu/#GT079687511 http://hdl.handle.net/11536/143310
Appears in Collections:	Thesis