標題: | Nanomechanical properties of Ag solder bumps doped with Pd and Au |
作者: | Wen, Hua-Chiang Chou, Wu-Ching Lin, Shiuan Huei Jiang, Don Son 電子物理學系 Department of Electrophysics |
關鍵字: | Ag solder;Thermal treatment;Nanoindentation;Hardness;Creep;Strength |
公開日期: | 1-十二月-2017 |
摘要: | As an approach to increasing their reliability, we doped Ag solder bumps with Pd and Au alloys to enhance their creep resistance, which we characterized using a nanoindentation technique. The hardnesses of the pure Ag and the Ag solders doped with Pd:3%, Pd:5%, and Pd:2%-Au:3% were 0.6 +/- 0.1, 1.8 +/- 02, 2.8 +/- 03, and 3.1 +/- 0.5 GPa, respectively. Although the hardness of the Ag solder was enhanced significantly when it contained Pd:2%-Au:3%, it exhibited a lower creep exponent (n > 2). The mechanism of the thermal recovery of the sample appears to be associated with activation of dislocation sources-also the reason for the decrease in hardness. The compounds doped with Pd:2%-Au:3% displayed significantly greater bond strengths and creep exponents, whereas the Pd only compounds exhibited poorer reliability. (C) 2017 Elsevier Ltd. All rights reserved. |
URI: | http://dx.doi.org/10.1016/j.microrel.2017.05.037 http://hdl.handle.net/11536/144218 |
ISSN: | 0026-2714 |
DOI: | 10.1016/j.microrel.2017.05.037 |
期刊: | MICROELECTRONICS RELIABILITY |
Volume: | 79 |
起始頁: | 270 |
結束頁: | 275 |
顯示於類別: | 期刊論文 |