標題: Influence of Permittivity on the Sensitivity of Porous Elastomer-Based Capacitive Pressure Sensors
作者: Liu, Shi-Yu
Lu, Jian-Gang
Shieh, Han-Ping D.
顯示科技研究所
Institute of Display
關鍵字: Capacitive pressure sensor;porous elastomer;Ag-PDMS composite;high sensitivity;percolation threshold
公開日期: 1-Mar-2018
摘要: Porous elastomer has been used as the dielectric layer of capacitive pressure sensors to reduce the Young's modulus and improve the sensitivity. In this paper, influence of permittivity on the sensitivity of porous elastomer-based capacitive pressure sensors is investigated. By introducing metallic particles (silver nanoparticles) into porous elastomer (polydimethylsiloxane) to increase its permittivity, the sensitivity of the porous composite-based capacitive pressure sensor is improved by 101.5% in the low-to-medium pressure regime (0-100 kPa). The capacitive pressure sensor also shows high linearity, good durability, and high noise immunity. Due to its high sensitivity, an artificial hand based on the capacitive pressure sensor can detect tiny pressure changes induced by wrist pulse and derive pressure distribution on different phalanges.
URI: http://dx.doi.org/10.1109/JSEN.2017.2789242
http://hdl.handle.net/11536/144465
ISSN: 1530-437X
DOI: 10.1109/JSEN.2017.2789242
期刊: IEEE SENSORS JOURNAL
Volume: 18
起始頁: 1870
結束頁: 1876
Appears in Collections:Articles