標題: | Controlled functionalization of a double-junction n(+)/n(-)/n(+) polysilicon nanobelt for hydrogen sensing application |
作者: | Nhan Ai Tran Sang, Chen-Hsiang Pan, Fu-Ming Sheu, Jeng-Tzong 材料科學與工程學系奈米科技碩博班 分子醫學與生物工程研究所 Graduate Program of Nanotechnology , Department of Materials Science and Engineering Institute of Molecular Medicine and Bioengineering |
公開日期: | 1-四月-2016 |
摘要: | In this paper, a double-junction n(+)/n(-)/n(+) polysilicon nanobelt selectively functionalized with platinum has been studied for hydrogen sensing application. The selective modification of the devices is performed by the combination of localized ablation of a resist and a lift-off process of e-beam evaporation of a catalyst material. The coverage of a Pt layer on the n(-) region is precisely controlled by adjusting Joule heating bias and pulse length. The Pt-functionalized devices show a rapid response to hydrogen with a limit of detection of only 5 ppm. The device with fully Pt-covered n(-) region is optimum for obtaining the best response to hydrogen. (C) 2016 The Japan Society of Applied Physics |
URI: | http://dx.doi.org/10.7567/JJAP.55.04EM01 http://hdl.handle.net/11536/145350 |
ISSN: | 0021-4922 |
DOI: | 10.7567/JJAP.55.04EM01 |
期刊: | JAPANESE JOURNAL OF APPLIED PHYSICS |
Volume: | 55 |
顯示於類別: | 期刊論文 |