標題: Controlled functionalization of a double-junction n(+)/n(-)/n(+) polysilicon nanobelt for hydrogen sensing application
作者: Nhan Ai Tran
Sang, Chen-Hsiang
Pan, Fu-Ming
Sheu, Jeng-Tzong
材料科學與工程學系奈米科技碩博班
分子醫學與生物工程研究所
Graduate Program of Nanotechnology , Department of Materials Science and Engineering
Institute of Molecular Medicine and Bioengineering
公開日期: 1-Apr-2016
摘要: In this paper, a double-junction n(+)/n(-)/n(+) polysilicon nanobelt selectively functionalized with platinum has been studied for hydrogen sensing application. The selective modification of the devices is performed by the combination of localized ablation of a resist and a lift-off process of e-beam evaporation of a catalyst material. The coverage of a Pt layer on the n(-) region is precisely controlled by adjusting Joule heating bias and pulse length. The Pt-functionalized devices show a rapid response to hydrogen with a limit of detection of only 5 ppm. The device with fully Pt-covered n(-) region is optimum for obtaining the best response to hydrogen. (C) 2016 The Japan Society of Applied Physics
URI: http://dx.doi.org/10.7567/JJAP.55.04EM01
http://hdl.handle.net/11536/145350
ISSN: 0021-4922
DOI: 10.7567/JJAP.55.04EM01
期刊: JAPANESE JOURNAL OF APPLIED PHYSICS
Volume: 55
Appears in Collections:Articles