標題: Performance of p-side-up thin-film AlGaInP light-emitting diodes with textured composite aluminum-doped zinc oxide transparent conductive layers
作者: Tseng, Ming-Chun
Wuu, Dong-Sing
Chen, Chi-Lu
Lee, Hsin-Ying
Lin, Yu-Chang
Horng, Ray-Hua
電機學院
電子工程學系及電子研究所
College of Electrical and Computer Engineering
Department of Electronics Engineering and Institute of Electronics
關鍵字: Texture surface;Light-emitting diodes;Composite aluminum-doped zinc oxide
公開日期: 25-六月-2017
摘要: Composite transparent conductive layers (TCLs) were deposited on the GaP window layer of p-side-up thin-film AlGaInP light-emitting diodes (LEDs) in order to enhance their light-extraction efficiency. The composite TCLs were fabricated from aluminum-doped zinc oxide (AZO) layers grown through atomic-layer deposition and pulsed-laser deposition. The results showed that wet-etching of composite AZO thin films improved the light extraction efficiency of the corresponding LED devices. The droop efficiencies of LEDs with flat AZO thin films, composite AZO thin films, and optimum textured composite AZO thin films were 29%, 30%, and 22%, respectively. LEDs with textured composite AZO layers exhibited favorable optoelectronic performance. When the injection current was increased from 20 to 1000 mA, the emission wavelengths of LEDs with flat AZO thin films, composite AZO thin films, and optimum textured composite AZO thin films shifted by 3, 5, and 3 nm, respectively. The optimum textured composite AZO thin film can not only improve LED performance but also effectively substitute flat TCLs in AlGaInP LED applications. (C) 2016 Elsevier B.V. All rights reserved.
URI: http://dx.doi.org/10.1016/j.surfcoat.2016.12.002
http://hdl.handle.net/11536/145563
ISSN: 0257-8972
DOI: 10.1016/j.surfcoat.2016.12.002
期刊: SURFACE & COATINGS TECHNOLOGY
Volume: 320
起始頁: 421
結束頁: 425
顯示於類別:期刊論文