標題: | Performance of p-side-up thin-film AlGaInP light-emitting diodes with textured composite aluminum-doped zinc oxide transparent conductive layers |
作者: | Tseng, Ming-Chun Wuu, Dong-Sing Chen, Chi-Lu Lee, Hsin-Ying Lin, Yu-Chang Horng, Ray-Hua 電機學院 電子工程學系及電子研究所 College of Electrical and Computer Engineering Department of Electronics Engineering and Institute of Electronics |
關鍵字: | Texture surface;Light-emitting diodes;Composite aluminum-doped zinc oxide |
公開日期: | 25-六月-2017 |
摘要: | Composite transparent conductive layers (TCLs) were deposited on the GaP window layer of p-side-up thin-film AlGaInP light-emitting diodes (LEDs) in order to enhance their light-extraction efficiency. The composite TCLs were fabricated from aluminum-doped zinc oxide (AZO) layers grown through atomic-layer deposition and pulsed-laser deposition. The results showed that wet-etching of composite AZO thin films improved the light extraction efficiency of the corresponding LED devices. The droop efficiencies of LEDs with flat AZO thin films, composite AZO thin films, and optimum textured composite AZO thin films were 29%, 30%, and 22%, respectively. LEDs with textured composite AZO layers exhibited favorable optoelectronic performance. When the injection current was increased from 20 to 1000 mA, the emission wavelengths of LEDs with flat AZO thin films, composite AZO thin films, and optimum textured composite AZO thin films shifted by 3, 5, and 3 nm, respectively. The optimum textured composite AZO thin film can not only improve LED performance but also effectively substitute flat TCLs in AlGaInP LED applications. (C) 2016 Elsevier B.V. All rights reserved. |
URI: | http://dx.doi.org/10.1016/j.surfcoat.2016.12.002 http://hdl.handle.net/11536/145563 |
ISSN: | 0257-8972 |
DOI: | 10.1016/j.surfcoat.2016.12.002 |
期刊: | SURFACE & COATINGS TECHNOLOGY |
Volume: | 320 |
起始頁: | 421 |
結束頁: | 425 |
顯示於類別: | 期刊論文 |