High numerical-aperture microlens fabricated by focused ion beam milling

Title:	High numerical-aperture microlens fabricated by focused ion beam milling
Authors:	Chiu, Yi Huang, Chien-Hsun Hsu, Ying-Chien 電控工程研究所 Institute of Electrical and Control Engineering
Keywords:	numerical aperture;microlens;focused ion beam;silicon nitride
Issue Date:	1-Jan-2007
Abstract:	The focusing objective lens is a key component in the optical pick-up head. In this paper, focused ion beam milling is used to fabricate a NA 0.65 microlens in the silicon nitride film suspended on a silicon substrate. The measured NA is 0.64 and the focused spot size is 0.64 mu m.
URI:	http://dx.doi.org/10.1117/12.738639 http://hdl.handle.net/11536/146533
ISBN:	978-0-8194-6762-1
ISSN:	0277-786X
DOI:	10.1117/12.738639
Journal:	OPTICAL DATA STORAGE 2007
Volume:	6620
Begin Page:	0
End Page:	0
Appears in Collections:	Conferences Paper

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