標題: Chromatic confocal microscopy to rapidly reveal nanoscale surface/interface topography by position-sensitive detection
作者: Zhuo, Guan-Yu
Hsu, Chia-Huan
Wang, Yen-Hsiang
Chan, Ming-Che
光電系統研究所
照明與能源光電研究所
Institute of Photonic System
Institute of Lighting and Energy Photonics
公開日期: 20-Aug-2018
摘要: This paper presents a confocal microscope for the rapid and noninvasive capture of threedimensional (3D) images showing the surface/interface topography in a far-field configuration. The proposed microscope features a nanoscale optical ruler capable of performing fast depth measurements based on the chromatic aberration of microscope objectives. A diffraction grating and a position-sensitive detector were used to extract the spectral shift, which directly maps the height of the surface with a nanoscale resolution. Because neither the mechanical scanning nor the spectrometer, which limit the speed of 3D imaging, are needed in the axial direction, full 3D surface topography images with nanoscale depth resolution can be acquired rapidly using the nanoscale optical ruler in conjunction with 2D lateral beam scanning. The presented technique overcomes the limitation of the detection speed of conventional chromatic confocal microscopy. In experiments, the 3D static and dynamic nanoscale surface profiles of several representative optoelectronic and electronic devices were demonstrated. This fast and non-invasive approach with nanoscale depth resolution to the measurement of topography images has considerable promise in academic research and industrial applications. Published by AIP Publishing.
URI: http://dx.doi.org/10.1063/1.5040502
http://hdl.handle.net/11536/148049
ISSN: 0003-6951
DOI: 10.1063/1.5040502
期刊: APPLIED PHYSICS LETTERS
Volume: 113
Appears in Collections:Articles