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dc.contributor.authorWu, Chien-Hungen_US
dc.contributor.authorChang, Kow-Mingen_US
dc.contributor.authorChen, Yi-Mingen_US
dc.contributor.authorZhang, Yu-Xinen_US
dc.contributor.authorCheng, Chia-Yaoen_US
dc.date.accessioned2019-04-02T05:58:14Z-
dc.date.available2019-04-02T05:58:14Z-
dc.date.issued2019-04-01en_US
dc.identifier.issn1533-4880en_US
dc.identifier.urihttp://dx.doi.org/10.1166/jnn.2019.15994en_US
dc.identifier.urihttp://hdl.handle.net/11536/148540-
dc.description.abstractConventional thin film transistor suffered from high threshold voltage, poor subthreshold swing, and high operation voltage. These shortcomings make the traditional thin film transistor does not meet the needs with the high-performance, high-resolution, low temperature and energy conservation nowadays. Due to the good selectivity of energy transformation and rapid heating rate, microwave annealing is promising to replace conventional furnace annealing and applied in the investigation. LaAlO3/ZrO2 is employed as gate electrode and gate dielectric layer for a-IGZO TFTs, under the premise that performance of a-IGZO TFTs without decreasing. With adjusting the power/time of microwave annealing, the effect on electrical characteristics of a-IGZO TFTs is investigated.en_US
dc.language.isoen_USen_US
dc.subjecta-IGZO TFTsen_US
dc.subjectLaAlO3en_US
dc.subjectZrO2en_US
dc.subjectMicrowave Annealingen_US
dc.titleInvestigation of Electrical Characteristics on LaAlO3/ZrO2/IGZO TFTs with Microwave Annealingen_US
dc.typeArticleen_US
dc.identifier.doi10.1166/jnn.2019.15994en_US
dc.identifier.journalJOURNAL OF NANOSCIENCE AND NANOTECHNOLOGYen_US
dc.citation.volume19en_US
dc.citation.spage2302en_US
dc.citation.epage2305en_US
dc.contributor.department電子工程學系及電子研究所zh_TW
dc.contributor.department國際半導體學院zh_TW
dc.contributor.departmentDepartment of Electronics Engineering and Institute of Electronicsen_US
dc.contributor.departmentInternational College of Semiconductor Technologyen_US
dc.identifier.wosnumberWOS:000451787200060en_US
dc.citation.woscount0en_US
Appears in Collections:Articles