標題: Development of absolutely radiant flux measurements with electrical calibrated microbolometer
作者: Hou, Kuan-Chou
Ou-Yang, Mang
Chiou, Jin-Chern
交大名義發表
National Chiao Tung University
公開日期: 2011
摘要: Absolutely flux radiometer measurements was developed with a microbolometer by using MEMS technology including lithography and etching. The radiometer is calibrated with electrical energy and adopted for absolute power and temperature drift, the sensor is called electric calibrated micro bolometer (EC mu B). Platinum is utilized to be a heater and a sensor at different layer, other electric isolation layers were used to separate signal from those two platinum layers. Those layers were integrated and constructed in a membrane which was formed by using TMAH etching solution. Accuracy of radiometer was identified that is proportional to ratio of electrical substitution power and radiant flux was measured with development of EC mu B.
URI: http://hdl.handle.net/11536/14866
ISBN: 978-1-4244-7935-1
ISSN: 1091-5281
期刊: 2011 IEEE INTERNATIONAL INSTRUMENTATION AND MEASUREMENT TECHNOLOGY CONFERENCE (I2MTC)
起始頁: 1464
結束頁: 1467
Appears in Collections:Conferences Paper