完整後設資料紀錄
DC 欄位語言
dc.contributor.authorHou, Kuan-Chouen_US
dc.contributor.authorOu-Yang, Mangen_US
dc.contributor.authorChiou, Jin-Chernen_US
dc.date.accessioned2014-12-08T15:20:53Z-
dc.date.available2014-12-08T15:20:53Z-
dc.date.issued2011en_US
dc.identifier.isbn978-1-4244-7935-1en_US
dc.identifier.issn1091-5281en_US
dc.identifier.urihttp://hdl.handle.net/11536/14866-
dc.description.abstractAbsolutely flux radiometer measurements was developed with a microbolometer by using MEMS technology including lithography and etching. The radiometer is calibrated with electrical energy and adopted for absolute power and temperature drift, the sensor is called electric calibrated micro bolometer (EC mu B). Platinum is utilized to be a heater and a sensor at different layer, other electric isolation layers were used to separate signal from those two platinum layers. Those layers were integrated and constructed in a membrane which was formed by using TMAH etching solution. Accuracy of radiometer was identified that is proportional to ratio of electrical substitution power and radiant flux was measured with development of EC mu B.en_US
dc.language.isoen_USen_US
dc.titleDevelopment of absolutely radiant flux measurements with electrical calibrated microbolometeren_US
dc.typeProceedings Paperen_US
dc.identifier.journal2011 IEEE INTERNATIONAL INSTRUMENTATION AND MEASUREMENT TECHNOLOGY CONFERENCE (I2MTC)en_US
dc.citation.spage1464en_US
dc.citation.epage1467en_US
dc.contributor.department交大名義發表zh_TW
dc.contributor.departmentNational Chiao Tung Universityen_US
dc.identifier.wosnumberWOS:000297171900295-
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