標題: | Highly sensitive nitric oxide gas sensor based on ZnO-nanorods vertical resistor operated at room temperature |
作者: | Singh, Pragya Hu, Li-Lun Zan, Hsiao-Wen Tseng, Tseung-Yuen 電子工程學系及電子研究所 電機工程學系 光電工程學系 光電工程研究所 Department of Electronics Engineering and Institute of Electronics Department of Electrical and Computer Engineering Department of Photonics Institute of EO Enginerring |
關鍵字: | nitric oxide;ZnO;nanorods thin film;vertical channel;gas sensor;metal oxide semiconductor |
公開日期: | 1-三月-2019 |
摘要: | We successfully demonstrated a simple and low-cost nitric oxide (NO) gas sensor to deliver parts-per-billion (ppb) regime detection at room temperature operation. A vertical-channel ZnO nanorods resistor is fabricated by putting silver nanowire electrode onto the hydrothermal ZnO nanorods film. With suitable process condition, the nanorods film exhibits a uniform morphology to enable the formation of gas-permeable nanowire top electrode while also the nanorods provide good surface-to-volume ratio to deliver strong reaction with NO gas. A detection limit to 10 ppb NO is observed while the sensing dynamic range from 10 ppb to 100 ppb is obtained. The sensor is reversible and the real-time sensing response is within 30 s. The results benefit the NO breath detection for patients with chronic inflammatory airway disease, such as asthma. |
URI: | http://dx.doi.org/10.1088/1361-6528/aaf7cb http://hdl.handle.net/11536/148693 |
ISSN: | 0957-4484 |
DOI: | 10.1088/1361-6528/aaf7cb |
期刊: | NANOTECHNOLOGY |
Volume: | 30 |
顯示於類別: | 期刊論文 |