標題: Highly sensitive nitric oxide gas sensor based on ZnO-nanorods vertical resistor operated at room temperature
作者: Singh, Pragya
Hu, Li-Lun
Zan, Hsiao-Wen
Tseng, Tseung-Yuen
電子工程學系及電子研究所
電機工程學系
光電工程學系
光電工程研究所
Department of Electronics Engineering and Institute of Electronics
Department of Electrical and Computer Engineering
Department of Photonics
Institute of EO Enginerring
關鍵字: nitric oxide;ZnO;nanorods thin film;vertical channel;gas sensor;metal oxide semiconductor
公開日期: 1-三月-2019
摘要: We successfully demonstrated a simple and low-cost nitric oxide (NO) gas sensor to deliver parts-per-billion (ppb) regime detection at room temperature operation. A vertical-channel ZnO nanorods resistor is fabricated by putting silver nanowire electrode onto the hydrothermal ZnO nanorods film. With suitable process condition, the nanorods film exhibits a uniform morphology to enable the formation of gas-permeable nanowire top electrode while also the nanorods provide good surface-to-volume ratio to deliver strong reaction with NO gas. A detection limit to 10 ppb NO is observed while the sensing dynamic range from 10 ppb to 100 ppb is obtained. The sensor is reversible and the real-time sensing response is within 30 s. The results benefit the NO breath detection for patients with chronic inflammatory airway disease, such as asthma.
URI: http://dx.doi.org/10.1088/1361-6528/aaf7cb
http://hdl.handle.net/11536/148693
ISSN: 0957-4484
DOI: 10.1088/1361-6528/aaf7cb
期刊: NANOTECHNOLOGY
Volume: 30
顯示於類別:期刊論文