標題: Correlation of surface processes with characteristic sensing responses of PdO thin films to ethanol
作者: Cheng, I-Kai
Wang, Jeng-Han
Tsai, Cheng-Yu
Chen, Yi-Sheng
Pan, Fu-Ming
材料科學與工程學系
Department of Materials Science and Engineering
關鍵字: PdO;Ethanol;MOS gas sensor;Dehydrogenation;Reduction;Pd nanoclusters
公開日期: 15-四月-2019
摘要: Gas sensing characteristics of PdO nanoflake thin films exposed to ethanol (EtOH) at temperatures below 250 degrees C was studied. The PdO thin film responses distinctly to 0.15 ppm EtOH in dry air at temperatures above 100 degrees C. A characteristic valley-shaped response feature develops in the early stage of the exposure to EtOH at 150 degrees C and above. Formation of the valley feature is a result of the combined effects of two types of surface processes, which successively modify the sensor conductance in the opposite way. Dehydrogenation of adsorbed EtOH induces reduction of preadsorbed oxygen anions and the PdO substrate, resulting in the drop of the conductance. On the other hand, subsequent adsorption of EtOH and oxygen on newly growing Pd nanoclusters, which develop due to the reduction of the PdO substrate, causes the increase in the conductance. The Pd nanoclusters can be later reoxidized in the EtOH gas mixture, thereby modifying the sensing behavior of the PdO sensor. X-ray photoelectron spectroscopy (XPS), diffusive reflectance infrared Fourier transform spectroscopy (DRIFTS) and temperature programmed desorption (TPD) were used to study adspecies and gaseous species formed in the EtOH gas sensing reactions. On the basis of the characteristic electrical response and chemical characterizations, we proposed the formation mechanism for the characteristic response feature.
URI: http://dx.doi.org/10.1016/j.apsusc.2018.12.195
http://hdl.handle.net/11536/148775
ISSN: 0169-4332
DOI: 10.1016/j.apsusc.2018.12.195
期刊: APPLIED SURFACE SCIENCE
Volume: 473
起始頁: 589
結束頁: 596
顯示於類別:期刊論文