標題: Preparation of large area and investigation of initial film growth of YBa2Cu3O7 by scanning pulsed laser deposition
作者: Wu, KH
Wang, RC
Chen, SP
Lin, HC
Juang, JY
Uen, TM
Gou, YS
電子物理學系
Department of Electrophysics
公開日期: 15-Jul-1996
摘要: A pulsed laser deposition system with a rotating reflector, which can generate an extended plume with a diameter of about 40 mm, has been proven to be viable in producing large area YBa2Cu3O7 (YBCO) thin films. Films with uniformity of thickness and electrical properties to within a few percents were obtained. By making a further modification on this laser scanning system, YBCO films with various thicknesses can be deposited in situ on several pieces of substrates under essentially identical deposition conditions, and particularly, in a continuous fashion. The atomic force microscopy (AFM) images reveal that films grown on NdGaO3 follow the Stranski-Krastanov (layer then island growth) mode, while films grown on as-polished MgO and on annealed MgO follow the Volmer-Weber (islands without layer growth) mode and step-flow mode, respectively. (C) 1996 American Institute of Physics.
URI: http://dx.doi.org/10.1063/1.118081
http://hdl.handle.net/11536/149245
ISSN: 0003-6951
DOI: 10.1063/1.118081
期刊: APPLIED PHYSICS LETTERS
Volume: 69
起始頁: 421
結束頁: 423
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