標題: | A novel structure for three-dimensional silicon magnetic transducers to improve the sensitivity symmetry |
作者: | Lin, HY Lei, TF Jeng, JJ Pan, CL Chang, CY 電子工程學系及電子研究所 光電工程研究所 Department of Electronics Engineering and Institute of Electronics Institute of EO Enginerring |
關鍵字: | magnetic transducers;silicon;symmetric sensitivity |
公開日期: | 1-九月-1996 |
摘要: | A three-dimensional silicon magnetic transducer with symmetric sensitivities in the x-, y- and z-directions and small cross sensitivity has been demonstrated. Devices are based on a design of a vertical Hall structure using the surrounding trench and symmetric design to suppress the cross sensitivity. The fabrication process is simple and can be used as a part of a standard integrated circuit process. The results show that almost equal sensitivities in all three components of magnetic field can be obtained by coating Ni/Co thin films on the backside of the substrates. The cross sensitivity is only 1.3% of the sensitivity. |
URI: | http://dx.doi.org/10.1016/S0924-4247(96)01323-4 http://hdl.handle.net/11536/149399 |
ISSN: | 0924-4247 |
DOI: | 10.1016/S0924-4247(96)01323-4 |
期刊: | SENSORS AND ACTUATORS A-PHYSICAL |
Volume: | 56 |
起始頁: | 233 |
結束頁: | 237 |
顯示於類別: | 期刊論文 |