标题: | Deposition of indium tin oxide films on polycarbonate substrates by radio-frequency magnetron sputtering |
作者: | Wu, WF Chiou, BS 电子工程学系及电子研究所 Department of Electronics Engineering and Institute of Electronics |
关键字: | coatings;indium oxide;optical properties;sputtering |
公开日期: | 20-四月-1997 |
摘要: | Indium tin oxide (ITO) films have been deposited onto polycarbonate (PC) substrates by radio frequency (rf) magnetron sputtering. The influence of the oxygen content during sputtering on the film morphology, and the electrical and optical properties of the films have been investigated. Both the refractive index and the extinction coefficient decrease with increasing oxygen content. In this study, the figures of merit T-10/R-sh of the films are higher than those for low-temperature sputtered films reported in the literature. (C) 1997 Elsevier Science S.A. |
URI: | http://dx.doi.org/10.1016/S0040-6090(96)09311-X http://hdl.handle.net/11536/149563 |
ISSN: | 0040-6090 |
DOI: | 10.1016/S0040-6090(96)09311-X |
期刊: | THIN SOLID FILMS |
Volume: | 298 |
起始页: | 221 |
结束页: | 227 |
显示于类别: | Articles |