標題: Effect of Depositing Tin Oxide Thin Film in Liquid Phase and Dip-Coating Cu and Au Catalysts on H2S Gas-Sensing Performance
作者: Chiou, Jin-Chern
Tsai, Sheng-Wei
Liu, Ya-Shu
Huang, Chen-Tang
電控工程研究所
Institute of Electrical and Control Engineering
關鍵字: LPD;tin oxide;porous;catalyst;gas sensor
公開日期: 1-Jan-2008
摘要: In this study, unlike conventional methods used to grow gas sensor films, a liquid-phase deposition method was used to deposit fluorine-doped tin oxide as the sensing material of a gas sensor. Furthermore, silica was doped into the film as an inhibitor to prevent the grain growth of tin oxide during the calcination process. This structure can be used to improve the sensitivity of a H,S sensor. By adding a moderate quantity of copper and gold catalysts on the surface of film, the sensitivity can be dramatically improved.
URI: http://hdl.handle.net/11536/149767
ISSN: 0914-4935
期刊: SENSORS AND MATERIALS
Volume: 20
起始頁: 425
結束頁: 433
Appears in Collections:Articles