標題: High Density Ni Nanocrystals Formed by Coevaporating Ni and SiO2 Pellets for the Nonvolatile Memory Device Application
作者: Hu, Chih-Wei
Chang, Ting-Chang
Tu, Chun-Hao
Huang, Yu-Hao
Lin, Chao-Cheng
Chen, Min-Chen
Huang, Fon-Shan
Sze, Simon M.
Tseng, Tseung-Yuen
電子工程學系及電子研究所
Department of Electronics Engineering and Institute of Electronics
關鍵字: nanofabrication;nanostructured materials;nickel;random-access storage;rapid thermal annealing;reliability;transmission electron microscopy;vacuum deposition;X-ray photoelectron spectra
公開日期: 1-一月-2010
摘要: We propose a method to fabricate a Ni nanocrystal structure by simultaneously coevaporating Ni and SiO2 pellets. An 800 degrees C rapid thermal annealing was used to enhance the Ni nanocrystals to aggregate. Transmission electron microscopy indicates that the formed Ni nanocrystals show a high density distribution of about 4.5x10(12) cm(-2). Then, the memory device using the Ni nanocrystals as charge-trapping centers was fabricated. The Ni nanocrystal memory device has an obvious memory window under capacitance-voltage measurement. X-ray photoelectron spectroscopy confirms the memory effect results from the Ni nanocrystals embedded in the SiO2 dielectric layer. Moreover, related reliability characteristics have been extracted.
URI: http://dx.doi.org/10.1149/1.3271023
http://hdl.handle.net/11536/149880
ISSN: 1099-0062
DOI: 10.1149/1.3271023
期刊: ELECTROCHEMICAL AND SOLID STATE LETTERS
Volume: 13
顯示於類別:期刊論文