標題: Plasma-enhanced flexible metal-insulator-metal capacitor using high-k ZrO2 film as gate dielectric with improved reliability
作者: Chu, Min-Ching
Meena, Jagan Singh
Cheng, Chih-Chia
You, Hsin-Chiang
Chang, Feng-Chih
Ko, Fu-Hsiang
應用化學系
奈米科技中心
Department of Applied Chemistry
Center for Nanoscience and Technology
公開日期: 1-Aug-2010
摘要: We demonstrate a new flexible metal-insulator-metal capacitor using 9.5-nm-thick ZrO2 film on a plastic polyimide substrate based on a simple and low-cost sal-gel precursor spin-coating process. The surface morphology of the ZrO2 film was investigated using scan electron microscope and atomic force microscope. The as-deposited ZrO2 film under suitable treatment of oxygen (O-2) plasma and then subsequent annealing at 250 degrees C exhibits superior low leakage current density of 9.0 x 10(-9) A/cm(2) at applied voltage of 5 V and maximum capacitance density of 13.3 fF/mu m(2) at 1 MHz. The as-deposited sol-gel film was completely oxidized when we employed O-2 plasma at relatively low temperature and power (30 W), hence enhancing the electrical performance of the capacitor. The shift (Zr 3d from 184.1 eV to 184.64 eV) in X-ray photoelectron spectroscopy of the binding energy of the electrons towards higher binding energy; clearly indicates that the O-2 plasma reaction was most effective process for the complete oxidation of the sol-gel precursor at relatively low processing temperature. (C) 2010 Elsevier Ltd. All rights reserved.
URI: http://dx.doi.org/10.1016/j.microrel.2010.05.004
http://hdl.handle.net/11536/149999
ISSN: 0026-2714
DOI: 10.1016/j.microrel.2010.05.004
期刊: MICROELECTRONICS RELIABILITY
Volume: 50
起始頁: 1098
結束頁: 1102
Appears in Collections:Articles