標題: Physical properties of polycrystalline Cr-doped SnO2 films grown on glasses using reactive dc magnetron co-sputtering technique
作者: Liu, Shiu-Jen
Chen, Liang-Yu
Liu, Chai-Yun
Fang, Hau-Wei
Hsieh, Jang-Hsing
Juang, Jenh-Yih
電子物理學系
Department of Electrophysics
關鍵字: Cr-doped SnO2 films;Co-sputtering technique;Optoelectronic properties;Paramagnetism
公開日期: 1-Jan-2011
摘要: Electrical, optical and magnetic properties of polycrystalline Cr-doped SnO2 films grown on glasses using reactive dc magnetron co-sputtering technique were investigated. The Cr content was modulated by varying the sputtering power applied on the Cr target. The carrier concentration and conductivity of doped films are reduced with increasing the Cr doping. Moreover, while the Cr content ratio Cr/( Sn + Cr) exceeds 0.9 at.%, the doped SnO2 films become insulators and the optical transmission is strongly affected. The surface roughness of sputtered films is also increased by Cr doping. The co-sputtered Cr-doped SnO2 films exhibit paramagnetic characteristics from room temperature down to 25 K. (C) 2010 Elsevier B.V. All rights reserved.
URI: http://dx.doi.org/10.1016/j.apsusc.2010.09.083
http://hdl.handle.net/11536/150208
ISSN: 0169-4332
DOI: 10.1016/j.apsusc.2010.09.083
期刊: APPLIED SURFACE SCIENCE
Volume: 257
起始頁: 2254
結束頁: 2258
Appears in Collections:Articles