標題: Ultraviolet Photoresponse of TiO2 Nanotube Arrays Fabricated by Atomic Layer Deposition
作者: Liu, Chien-Min
Chen, Chih
Cheng, Hsyi-En
材料科學與工程學系
Department of Materials Science and Engineering
公開日期: 1-一月-2011
摘要: We used atomic layer deposition with anodic aluminum oxide, to fabricate self-aligned TiO2 nanotube arrays, on a Si substrate, at 400 degrees C. Numerous p-n nanojunctions can be fabricated using this approach. In the absence of the external application of a bias voltage, these crystalline nanotubes make very sensitive ultraviolet sensors. The sensitivity is a result of the built-in voltage, generated by the nanojunction formed between the TiO2 nanotubes and the Si substrate, which separates electron-hole pairs and produces photocurrents. In addition, the one-dimensional structure of the TiO2 nanotubes provides a well-defined path for the transportation of the photo-generated carriers. (C) 2011 The Electrochemical Society. [DOI: 10.1149/1.3576076] All rights reserved.
URI: http://dx.doi.org/10.1149/1.3576076
http://hdl.handle.net/11536/150274
ISSN: 1099-0062
DOI: 10.1149/1.3576076
期刊: ELECTROCHEMICAL AND SOLID STATE LETTERS
Volume: 14
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