標題: Effect of SiO2 Additive As Inhibitor on Crystalline Structure and H2S Sensing Performance of CuO-Au-SnO2 Thin Film Prepared by Liquid Phase Deposition
作者: Chiou, Jin-Chern
Tsai, Shang-Wei
Chiou, Jin-Chern
Huang, Cheng-Tang
電子工程學系及電子研究所
Department of Electronics Engineering and Institute of Electronics
公開日期: 1-Jan-2010
摘要: In situ SiO2-doped SnO2 thin films have been prepared by liquid phase deposition method. The effect of SiO2 additive on the surface morphology and crystalline structural of the thin films were investigated by grazing incident angle X-ray diffraction (GIAXRD) and scanning electron microscopy (SEM). In the characteristics of sensing response, the SiO2-doped CuO-Au-SnO2 gas sensors (Si/Sn = 0.25 and 0.33) have greater sensitivity and shorter response time than CuO-Au-SnO2 gas sensor. However, the doped CuO-Au-SnO2 gas sensors (Si/Sn = 0.33) can obtained better sensitivity ( S = 67 for 2ppm) and response time (t90% < 3 s).
URI: http://dx.doi.org/10.1109/ICSENS.2010.5690256
http://hdl.handle.net/11536/150521
ISSN: 1930-0395
DOI: 10.1109/ICSENS.2010.5690256
期刊: 2010 IEEE SENSORS
起始頁: 333
結束頁: 336
Appears in Collections:Conferences Paper