標題: The alpha-Si/SiGe core/shell nano-wire as highly sensitive bio-sensor
作者: Chang, Kow-Ming
Chen, Chu-Feng
Lai, Chiung-Hui
Liu, Chung-Hsien
Wang, Yu-Bin
Wu, Chin-Ning
Hsieh, Cheng-Ting
電子工程學系及電子研究所
Department of Electronics Engineering and Institute of Electronics
公開日期: 1-一月-2011
摘要: Reducing the width of a nano-wire increases its surface to volume ratio, increasing the sensitivity of its conductivity to charges on its surface. Our previous studies have shown that increasing the Ge fraction in Si1-xGex nano-wires improves their sensitivity as bio-sensing. In this work, an alpha-Si/SiGe core/shell nano-wire is successfully fabricated using side-wall spacer method. The maximum sensitivity of a nano-wire bio-sensor with an optimized alpha-Si/SiGe thickness ratio is investigated.
URI: http://dx.doi.org/10.1149/1.3640402
http://hdl.handle.net/11536/150552
ISSN: 1938-5862
DOI: 10.1149/1.3640402
期刊: NANOTECHNOLOGY (GENERAL) - 219TH ECS MEETING
Volume: 35
起始頁: 31
結束頁: 42
顯示於類別:會議論文