A Piezoelectric Two-Degree-of-Freedom Nanostepping Motor with a Positioning Sensor

Abstract

The design of the proposed piezoelectric two-degree-of-freedom nanostepping motor is driven by the principle of stick-slip. The proposed design not only improves the control of clamping force when the stick-slip cycle is working but adds a position sensing detector (PSD) to record translational distance and rotational angle simultaneously. In general, one degree of freedom needs one sensor to record position information, but a PSD can measure two degrees of freedom simultaneously in this paper. Due to the photosensing element PSD, more applications can be applied in future, such as feedback control for precise positioning.