標題: | Enhancing Performance in Thin Tilm Transistors with Vacuum or Solution Processed Amorphous Oxide Semiconductors Towards Display Applications |
作者: | Chen, Changdong Li, Gongtan Li, MinMin Yang, Bo-Ru Liu, Chuan Lee, Chia-Yu Wu, Yuan-Chun Lu, Po-Yen Shieh, Han-Ping D. 光電工程學系 顯示科技研究所 Department of Photonics Institute of Display |
關鍵字: | Amorphous oxide semiconductor;bias stability;hybrid inverter;additive patterning;solution based |
公開日期: | 1-一月-2018 |
摘要: | To simultaneously achieve high mobility and good reliability of thin-film transistors (TFTs), we controlled oxygen vacancies via nitrogen incorporation in InGaZnO TFTs from vacuum-or solution-based methods. For display applications, IGZO and crystalline silicon TFTs were integrated together to build hybrid CMOS. Also, additive patterning method is developed for solution-processed oxide semiconductors, based on which wafer-scale TFT arrays and NMOS have been demonstrated. |
URI: | http://hdl.handle.net/11536/150965 |
ISSN: | 2373-5422 |
期刊: | 2018 IEEE INTERNATIONAL CONFERENCE ON MANIPULATION, MANUFACTURING AND MEASUREMENT ON THE NANOSCALE (3M-NANO) - CONFERENCE PROCEEDINGS |
起始頁: | 237 |
結束頁: | 240 |
顯示於類別: | 會議論文 |