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dc.contributor.author侯拓宏zh_TW
dc.contributor.author潘正聖zh_TW
dc.contributor.author劉邦軒zh_TW
dc.date.accessioned2019-04-11T06:20:31Z-
dc.date.available2019-04-11T06:20:31Z-
dc.date.issued2018-07-01en_US
dc.identifier.govdocH01L021/28en_US
dc.identifier.urihttp://hdl.handle.net/11536/151476-
dc.description.abstract一種包含場效電晶體裝置的半導體裝置,包含基板與在基板上的二維材料所製成的通道結構。多個源極與汲極接觸部分地形成於二維材料上。第一介電層至少部分地形成在通道結構上且至少部分地形成在源極與汲極接觸上。第一介電層用以捕獲多個電荷載子。第二介電層形成於第一介電層上,且閘極電極形成於第二介電層上。zh_TW
dc.language.isozh_TWen_US
dc.title半導體裝置的製造方法zh_TW
dc.typePatentsen_US
dc.citation.patentcountryTWNen_US
dc.citation.patentnumber201824375en_US
Appears in Collections:Patents


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