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dc.contributor.author洪瑞華zh_TW
dc.contributor.author李彥助zh_TW
dc.contributor.author董俊沂zh_TW
dc.contributor.author蔡錫翰zh_TW
dc.contributor.author鄭力中zh_TW
dc.date.accessioned2019-04-11T06:20:44Z-
dc.date.available2019-04-11T06:20:44Z-
dc.date.issued2019-04-01en_US
dc.identifier.govdocH01L027/14en_US
dc.identifier.urihttp://hdl.handle.net/11536/151531-
dc.description.abstract本發明為一種具寬能隙氧化物之深紫外線感測裝置,其利用一氧化物磊晶感測層設置於基板,使深紫外線(Deep Ultraviolet)感測裝置具較佳之特性, ,且進一步使深紫外線刺激氧化物磊晶感測層之光電流大幅增加,特別是針對深紫外光波段(280-200 nm)之感測效能大為提升。zh_TW
dc.language.isozh_TWen_US
dc.title具寬能隙氧化物之深紫外線感測裝置zh_TW
dc.typePatentsen_US
dc.citation.patentcountryTWNen_US
dc.citation.patentnumber201913979en_US
Appears in Collections:Patents


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