標題: The Development of CMOS Amperometric Sensing Chip with a Novel 3-Dimensional TiN Nano-Electrode Array
作者: Lien, Chun-Lung
Yuan, Chiun-Jye
交大名義發表
生物科技學系
分子醫學與生物工程研究所
National Chiao Tung University
Department of Biological Science and Technology
Institute of Molecular Medicine and Bioengineering
關鍵字: nano-electrode;CMOS;3D Sensor;titanium nitride;hydrogen peroxide
公開日期: 1-Mar-2019
摘要: An electrochemical sensing chip with an 8 x 8 array of titanium nitride three-dimensional nano-electrodes (TiN 3D-NEA) was designed and fabricated via a standard integrated complementary metal oxide semiconductor process. Each nano-electrode in 3D-NEA exhibited a pole-like structure with a radius of 100 nm and a height of 35 nm. The numeric simulation showed that the nano-electrode with a radius of around 100 nm exhibited a more uniformly distributed electric field and a much higher electric field magnitude compared to that of the microelectrode. Cyclic voltammetry study with Ru(NH3)(6)(3+) also revealed that the TiN 3D-NEA exhibited a much higher current density than that obtained from the microelectrode by two orders of magnitude. Further studies showed that the electrocatalytical reduction of hydrogen peroxide (H2O2) could occur on a TiN 3D-NEA-based sensing chip with a high sensitivity of 667.2 mAmM(-1)cm(-2). The linear detection range for H2O2 was between 0.1 M and 5 mM with a lowest detection limit of 0.1 M. These results indicated that the fabricated TiN 3D-NEA exhibited high catalytic activity and sensitivity to H2O2 and could be a promising sensor for H2O2 measurement.
URI: http://dx.doi.org/10.3390/s19050994
http://hdl.handle.net/11536/151634
ISSN: 1424-8220
DOI: 10.3390/s19050994
期刊: SENSORS
Volume: 19
Issue: 5
起始頁: 0
結束頁: 0
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