Title: Manganese ion implanted ultrananocrystalline diamond films: Optical and electrical characterization
Authors: Kunuku, Srinivasu
Chen, Chien-Hsu
Hsieh, Ping-Yen
Lin, Bo-Rong
Tai, Nyan-Hwa
Niu, Huan
電子工程學系及電子研究所
Department of Electronics Engineering and Institute of Electronics
Issue Date: 1-Apr-2019
Abstract: We report the optical and electrical properties of high-dose (10(15)-10(17) ions/cm(2)) Mn-ion implanted ultrananocrystalline diamond (Mn-UNCD) films. Mn-ion implantation and post-annealing of UNCD films lead to the formation of Mn-related color centers, characterized in Mn-UNCD films by their zero phonon line emissions at 621.2 nm and phonon sidebands at 611.2 nm and 630.3 nm. Raman spectra of Mn-UNCD films indicated amorphization via high-dose Mn-ion implantation and that the annealing process results in graphitization of the films. The Mn-UNCD film implanted with the Mn-ion dose of 1017 ions/cm(2) exhibits a conductivity of 122.25 (Omega cm)(-1), as well as enhanced field electron emission (FEE) properties such as a turn-on field of 10.67 V/mu m and a FEE current density of 0.85 mA/cm(2).
URI: http://dx.doi.org/10.1063/1.5084272
http://hdl.handle.net/11536/151681
ISSN: 0003-6951
DOI: 10.1063/1.5084272
Journal: APPLIED PHYSICS LETTERS
Volume: 114
Issue: 13
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Appears in Collections:Articles