Structural and optical characteristics of non-polar ZNO epitaxial films grown by radio-frequency magnetron sputtering

doi:10.1107/S2053273318090393

標題:	Structural and optical characteristics of non-polar ZNO epitaxial films grown by radio-frequency magnetron sputtering
作者:	Hsu, Chia-Hung Lin, Bi-Hsuan Liu, Wei-Rein Hsieh, Wen-Fong 光電工程學系光電工程研究所 Department of Photonics Institute of EO Enginerring
關鍵字:	non-polar ZnO;strain;structural defects
公開日期:	1-Aug-2018
URI:	http://dx.doi.org/10.1107/S2053273318090393 http://hdl.handle.net/11536/152262
ISSN:	2053-2733
DOI:	10.1107/S2053273318090393
期刊:	ACTA CRYSTALLOGRAPHICA A-FOUNDATION AND ADVANCES
Volume:	74
起始頁:	0
結束頁:	0
Appears in Collections:	Articles