標題: | Negative threshold voltage shift for LTPS TFTs under x-ray irradiation and gate bias |
作者: | Tai, Ya-Hsiang Yeh, Shan Chan, Po-Chun Li, Yi-Shen Huang, Shih-Hsuan Tu, Cheng-Che Chang, Ting-Chang 電機學院 光電工程學系 College of Electrical and Computer Engineering Department of Photonics |
關鍵字: | low-temperature polycrystalline silicon (LTPS);thin-film transistor (TFT);X-ray;gate bias;gate insulator |
公開日期: | 1-Sep-2019 |
摘要: | In this paper, the behavior of the low-temperature polycrystalline-silicon (LTPS) thin film transistors (TFTs) during x-ray irradiation and gate bias voltage (V-G) simultaneously is analyzed. Both n-type and p-type LTPS TFTs show negative shifts of threshold voltage under same dose of x-ray irradiation, regardless of the V-G polarity, while the field effect mobility of n-type LTPS TFT keeps fairly well. The degradation of subthreshold swing is attributed to the interface states, which can be repaired by 300 degrees C annealing. A model is proposed to explain the results for different V-G, and verified by changing the thickness of the gate oxide. More irradiation-induced holes are trapped by the far defects owing to the electric field. This study can be helpful to develop more stable devices or circuits for the application of x-ray image sensors. |
URI: | http://dx.doi.org/10.1088/1361-6641/ab3157 http://hdl.handle.net/11536/152635 |
ISSN: | 0268-1242 |
DOI: | 10.1088/1361-6641/ab3157 |
期刊: | SEMICONDUCTOR SCIENCE AND TECHNOLOGY |
Volume: | 34 |
Issue: | 9 |
起始頁: | 0 |
結束頁: | 0 |
Appears in Collections: | Articles |