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dc.contributor.authorChen, C. T.en_US
dc.contributor.authorPeng, K. P.en_US
dc.contributor.authorGeorge, T.en_US
dc.contributor.authorLin, H. C.en_US
dc.contributor.authorLi, Pei-Wenen_US
dc.date.accessioned2019-09-02T07:46:17Z-
dc.date.available2019-09-02T07:46:17Z-
dc.date.issued2019-05-01en_US
dc.identifier.issn2158-3226en_US
dc.identifier.urihttp://dx.doi.org/10.1063/1.5088554en_US
dc.identifier.urihttp://hdl.handle.net/11536/152677-
dc.description.abstractWe report the novel tunability of Ge content, thickness, and even curvature/shape in self-aligned, hemispherical-shell shaped SiGe recess channels created in Si substrates by Ge nanospheres that are proximally located to these nanoshells. The hemispherical recess SiGe nanoshells arise from the migration of Ge interstitials through the intervening oxide layer between the Ge nanospheres and the Si substrate, and their Ge content, thickness, and curvatures exhibit a monotonic dependence on the depth of penetration of the Ge nanospheres into the Si substrate. Following a unique "explosion" phenomenon in which the Ge nanosphere breaks up into multiple nanocrystallites, both the Ge content and thickness of the SiGe nanoshells are significantly decreased by reverse migration of Ge interstitials from the SiGe nanoshells to the Ge nanocrystallites. (c) 2019 Author(s). All article content, except where otherwise noted, is licensed under a Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/).en_US
dc.language.isoen_USen_US
dc.titleTunable Ge content and thickness in hemispherical-shell shaped SiGe recess channels created by proximal Ge nanospheresen_US
dc.typeArticleen_US
dc.identifier.doi10.1063/1.5088554en_US
dc.identifier.journalAIP ADVANCESen_US
dc.citation.volume9en_US
dc.citation.issue5en_US
dc.citation.spage0en_US
dc.citation.epage0en_US
dc.contributor.department交大名義發表zh_TW
dc.contributor.departmentNational Chiao Tung Universityen_US
dc.identifier.wosnumberWOS:000477701000120en_US
dc.citation.woscount0en_US
Appears in Collections:Articles