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Ge FinFET CMOS Inverters With Improved Channel Surface Roughness by Using In-Situ ALD Digital O-3 Treatment | 6 |
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June 2024 | July 2024 | August 2024 | September 2024 | October 2024 | November 2024 | December 2024 | |
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Ge FinFET CMOS Inverters With Improved Channel Surface Roughness by Using In-Situ ALD Digital O-3 Treatment | 0 | 0 | 0 | 0 | 0 | 0 | 6 |
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