標題: A Novel Three-Axial Magnetic-Piezoelectric MEMS AC Magnetic Field Sensor
作者: Yeh, Po-Chen
Duan, Hao
Chung, Tien-Kan
機械工程學系
國際半導體學院
Department of Mechanical Engineering
International College of Semiconductor Technology
關鍵字: MEMS;magnetic field sensor;AC;three-axial;piezoelectric
公開日期: 1-Oct-2019
摘要: We report a novel three-axial magnetic-piezoelectric microelectromechanical systems (MEMS) magnetic field sensor. The sensor mainly consists of two sensing elements. Each of the sensing elements consists of a magnetic Ni thick film, a Pt/Ti top electrode, a piezoelectric lead zirconate titanate (PZT) thin film, a Pt/Ti bottom electrode, a SiO2 insulation layer, and a moveable Si MEMS diaphragm. When the sensor is subjected to an AC magnetic field oscillating at 7.5 kHz, a magnetic force interaction between the magnetic field and Ni thick film is produced. Subsequently, the force deforms and deflects the diaphragms as well as the PZT thin film deposited on the diaphragms. The deformation and deflection produce corresponding voltage outputs due to the piezoelectric effect. By analyzing the voltage outputs through our criterion, we can obtain details of the unknown magnetic fields to which the sensor is subjected. This achieves sensing of three-axial magnetic fields. The experimental results show that the sensor is able to sense three-axial magnetic fields ranging from 1 to 20 Oe, with X-axial, Y-axial, and Z-axial sensitivities of 0.156 mV(rms)/Oe, 0.156 mV(rms)/Oe, and 0.035 mV(rms)/Oe, respectively, for sensing element A and 0.033 mV(rms)/Oe, 0.044 mV(rms)/Oe, and 0.130 mV(rms)/Oe, respectively, for sensing element B.
URI: http://dx.doi.org/10.3390/mi10100710
http://hdl.handle.net/11536/153232
DOI: 10.3390/mi10100710
期刊: MICROMACHINES
Volume: 10
Issue: 10
起始頁: 0
結束頁: 0
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