標題: | Paraffin wax passivation layer improvements in electrical characteristics of bottom gate amorphous indium-gallium-zinc oxide thin-film transistors |
作者: | Chang, Geng-Wei Chang, Ting-Chang Syu, Yong-En Tsai, Tsung-Ming Chang, Kuan-Chang Tu, Chun-Hao Jian, Fu-Yen Hung, Ya-Chi Tai, Ya-Hsiang 電子工程學系及電子研究所 光電工程學系 Department of Electronics Engineering and Institute of Electronics Department of Photonics |
關鍵字: | Indium Gallium Zinc Oxide (IGZO);Thin film transistors (TFTs);Passivation layer |
公開日期: | 30-十二月-2011 |
摘要: | In this research, paraffin wax is employed as the passivation layer of the bottom gate amorphous indium-gallium-zinc oxide thin-film transistors (a-IGZO TFTs), and it is formed by sol-gel process in the atmosphere. The high yield and low cost passivation layer of sol-gel process technology has attracted much attention for current flat-panel-display manufacturing. Comparing with passivation-free a-IGZO TFTs, passivated devices exhibit a superior stability against positive gate bias stress in different ambient gas, demonstrating that paraffin wax shows gas-resisting characteristics for a-IGZO TFTs application. Furthermore, light-induced stretch-out phenomenon for paraffin wax passivated device is suppressed. This superior stability of the passivated device was attributed to the reduced total density of states (DOS) including the interfacial and semiconductor bulk trap densities. (C) 2011 Elsevier B.V. All rights reserved. |
URI: | http://dx.doi.org/10.1016/j.tsf.2011.08.104 http://hdl.handle.net/11536/15349 |
ISSN: | 0040-6090 |
DOI: | 10.1016/j.tsf.2011.08.104 |
期刊: | THIN SOLID FILMS |
Volume: | 520 |
Issue: | 5 |
起始頁: | 1608 |
結束頁: | 1611 |
顯示於類別: | 期刊論文 |