標題: Visual Servo Control System of a Piezoelectric 2-Degree-of-Freedom Nano-Stepping Motor
作者: Chen, Cheng-Lung
Hung, Shao-Kang
機械工程學系
Department of Mechanical Engineering
關鍵字: piezoelectricity;visual servo control;stepping motor;nano-positioner;stick-slip
公開日期: 1-Dec-2019
摘要: A nano-stepping motor can translate or rotate when its piezoelectric element pair is electrically driven in-phase or anti-phase. It offers millimeter-level stroke, sub-micron-level stepping size, and sub-nanometer-level scanning resolution. This article proposes a visual servo system to control the nano-stepping motor, since its stepping size is not consistent due to changing contact friction, using a custom built microscopic instrument and image recognition software. Three kinds of trajectories straight lines, circles, and pentagrams are performed successfully. The smallest straightness and roundness ever tested are 0.291 mu m and 2.380 mu m. Experimental results show that the proposed controller can effectively compensate for the error and precisely navigate the rotor along a desired trajectory.
URI: http://dx.doi.org/10.3390/mi10120811
http://hdl.handle.net/11536/153548
DOI: 10.3390/mi10120811
期刊: MICROMACHINES
Volume: 10
Issue: 12
起始頁: 0
結束頁: 0
Appears in Collections:Articles