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dc.contributor.authorLin, Bo-Rongen_US
dc.contributor.authorWang, Chiung-Chien_US
dc.contributor.authorChen, Chien-Hsuen_US
dc.contributor.authorKunuku, Srinivasuen_US
dc.contributor.authorHsiao, Tung-Yuanen_US
dc.contributor.authorYu, Hung-Kaien_US
dc.contributor.authorChen, Tzung-Yuangen_US
dc.contributor.authorChang, Yu-Jenen_US
dc.contributor.authorLiao, Li-Chuanen_US
dc.contributor.authorChang, Chun-Hsiangen_US
dc.contributor.authorChen, Fang-Hsinen_US
dc.contributor.authorNiu, Huanen_US
dc.contributor.authorLee, Chien-Pingen_US
dc.date.accessioned2020-02-02T23:54:41Z-
dc.date.available2020-02-02T23:54:41Z-
dc.date.issued2019-11-07en_US
dc.identifier.issn0021-8979en_US
dc.identifier.urihttp://dx.doi.org/10.1063/1.5117342en_US
dc.identifier.urihttp://hdl.handle.net/11536/153632-
dc.description.abstractIon implantation is used to create nanodiamonds (NDs) with embedded magnetic ions for use in a wide range of biological and medical applications; however, the effectiveness of this process depends heavily on separating magnetic NDs from nonmagnetic ones. In this study, we use secondary ion mass spectrometry to verify the implantation of magnetic ions in NDs and the success of separation. When applied to a series of NDs with embedded iron or manganese ions, the sorting tool used in this study proved highly effective in selecting magnetic NDs. Besides, multienergy ion implantation and precise thickness control of NDs coating on the silicon wafer were suggested to improve this technology. Published under license by AIP Publishing.en_US
dc.language.isoen_USen_US
dc.titleSecondary ion mass spectrometry to verify the implantation of magnetic ions in nanodiamondsen_US
dc.typeArticleen_US
dc.identifier.doi10.1063/1.5117342en_US
dc.identifier.journalJOURNAL OF APPLIED PHYSICSen_US
dc.citation.volume126en_US
dc.citation.issue17en_US
dc.citation.spage0en_US
dc.citation.epage0en_US
dc.contributor.department電子工程學系及電子研究所zh_TW
dc.contributor.departmentDepartment of Electronics Engineering and Institute of Electronicsen_US
dc.identifier.wosnumberWOS:000504088300039en_US
dc.citation.woscount0en_US
Appears in Collections:Articles