標題: An Inkjet Printing Technique for Scalable Microfabrication of Graphene-Based Sensor Components
作者: Fu, Yu-Min
Chou, Meng-Chuin
Kang, Che-Hao
Cheng, Yu-Ting
Wu, Pu-Wei
Chen, Guan-Yu
Secor, Ethan B.
Hersam, Mark C.
材料科學與工程學系
生醫工程研究所
電子工程學系及電子研究所
Department of Materials Science and Engineering
Institute of Biomedical Engineering
Department of Electronics Engineering and Institute of Electronics
關鍵字: Microelectromechanical systems;inkjet printing;microstructure;tactile sensors
公開日期: 1-Jan-2020
摘要: This paper presents a versatile and precise graphene patterning technique using the combined process of masking and inkjet printing. A graphene-based structure is fabricated by first defining the structural pattern and position using a masking mold, which can be either electroplated copper or deep reactive ion etching (DRIE) silicon shadow mask, followed by inkjet deposition of graphene ink and lift-off. The hybrid technique can realize high-fidelity, high-resolution graphene-based microstructures including free-standing and cantilever beams, four-point resistive measurement structures, and piezoresistive sensing elements with a minimum line width of similar to 20 mu m. Moreover, this method can facilitate the micropatterning of graphene oxide (GO) and reduced graphene oxide (rGO) on substrates such as polydimethylsiloxane (PDMS) and SiO2/Si for selective cell culturing applications. Owing to the characteristics of low chemical usage, low process temperature and complexity, and high fiexibility and fault tolerance of inkjet printing, this technique demonstrates compelling potential for a variety of biomedical applications.
URI: http://dx.doi.org/10.1109/ACCESS.2020.2990501
http://hdl.handle.net/11536/154907
ISSN: 2169-3536
DOI: 10.1109/ACCESS.2020.2990501
期刊: IEEE ACCESS
Volume: 8
起始頁: 79338
結束頁: 79346
Appears in Collections:Articles