Low temperature deposition of high quality single crystalline AlN thin films on sapphire using highly oriented monolayer MoS 2 as a buffer layer

doi:10.1016/j.jcrysgro.2020.125726

標題:	Low temperature deposition of high quality single crystalline AlN thin films on sapphire using highly oriented monolayer MoS 2 as a buffer layer
作者:	Chien, Hung-Yi Kuo, Po-Chun Kao, Hui-Ling Chen, Jyh-Shin Chen, Meei-Ru Lu, Li-Syuan Chueh, Wei-Chen Chang, Wen-Hao 交大名義發表電子物理學系 National Chiao Tung University Department of Electrophysics
公開日期:	15-八月-2020
URI:	http://dx.doi.org/10.1016/j.jcrysgro.2020.125726 http://hdl.handle.net/11536/154931
ISSN:	0022-0248
DOI:	10.1016/j.jcrysgro.2020.125726
期刊:	JOURNAL OF CRYSTAL GROWTH
Volume:	544
起始頁:	0
結束頁:	0
顯示於類別：	期刊論文