Low temperature deposition of high quality single crystalline AlN thin films on sapphire using highly oriented monolayer MoS 2 as a buffer layer

doi:10.1016/j.jcrysgro.2020.125726

Title:	Low temperature deposition of high quality single crystalline AlN thin films on sapphire using highly oriented monolayer MoS 2 as a buffer layer
Authors:	Chien, Hung-Yi Kuo, Po-Chun Kao, Hui-Ling Chen, Jyh-Shin Chen, Meei-Ru Lu, Li-Syuan Chueh, Wei-Chen Chang, Wen-Hao 交大名義發表電子物理學系 National Chiao Tung University Department of Electrophysics
Issue Date:	15-Aug-2020
URI:	http://dx.doi.org/10.1016/j.jcrysgro.2020.125726 http://hdl.handle.net/11536/154931
ISSN:	0022-0248
DOI:	10.1016/j.jcrysgro.2020.125726
Journal:	JOURNAL OF CRYSTAL GROWTH
Volume:	544
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Appears in Collections:	Articles