標題: AN ALIGNMENT SCHEME FOR LOW COST AND HIGH PRECISION SLOB FABRICATION USING AN ELECTROMAGNETIC MICROACTUATOR WITH 5 DOF
作者: Chen, Chih-Chung
Fu, Yu-Min
Hsu, Hsin-Feng
Cheng, Yu-Ting
電子工程學系及電子研究所
Department of Electronics Engineering and Institute of Electronics
關鍵字: SiOB;Electromagnetic Microactuators;Alignment Scheme;Low Cost;High Precision;Optical Communication
公開日期: 1-一月-2019
摘要: This paper presents an alignment scheme for SiOB fabrication using an electromagnetic force-driven microactuator with five degrees of freedom (5 DOF) of movement. The actuator comprising four sets of corrugated springs and spiral coils driven by Lorentz and reluctant force respectively can accomplish linearly horizontal and vertical displacement and tilt angle ranging within 2 and 10.5Am, and 0.1 degrees for positioning optical lens with a resolution of 0.mu m, which has been experimentally validated to facilitate h scheme feasibly.
URI: http://hdl.handle.net/11536/155011
ISBN: 978-1-7281-2007-2
期刊: 2019 20TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS & EUROSENSORS XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)
起始頁: 1572
結束頁: 1575
顯示於類別:會議論文