標題: Ni-carbon nanotubes nanocomposite for robust microelectromechanical systems fabrication
作者: Tsai, LN
Cheng, YT
Hsu, WS
Fang, WL
電子工程學系及電子研究所
Department of Electronics Engineering and Institute of Electronics
公開日期: 1-一月-2006
摘要: This article presents a novel fabrication process to enhance the operational performance and reliability of electrothermal microactuators. Carbon nanotubes (CNTs) (outer diameter: 10-20 nm, innerdiameter: 5-10 nm, length: 0.5-200 mu m) are incorporated in an electrolytic nickel deposition process in which a well-dispersed Ni-CNTs colloidal solution is made by a special acid oxidative method to synthesis a Ni-CNTs nanocomposite for device fabrication. Measurement results show that the microactuator plated with CNTs (0.028 g/L) needs the power requirement less 95% than the pure nickel device at the same output displacement of 3 mu m. The performance improvement of the electrothermal microactuator made of the nanocomposite, including device strength and power efficiency, has shown to be similar to the Ni-diamond composites (L. N. Tsai, G. R. Shen, Y. T. Cheng, and W. S. Hsu, The 54th Electronic Components and Technology Conference, June 2004, pp. 472-476)). In addition, the E/p ratio of the Ni-CNTs composite can be enhanced to 1.47 times higher than that of pure nickel, which is a fascinating result for resonant device fabrication. (c) 2006 American Vacuum Society.
URI: http://dx.doi.org/10.1116/1.2161222
http://hdl.handle.net/11536/12835
ISSN: 1071-1023
DOI: 10.1116/1.2161222
期刊: JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
Volume: 24
Issue: 1
起始頁: 205
結束頁: 210
顯示於類別:會議論文


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