標題: | Ni-carbon nanotubes nanocomposite for robust microelectromechanical systems fabrication |
作者: | Tsai, LN Cheng, YT Hsu, WS Fang, WL 電子工程學系及電子研究所 Department of Electronics Engineering and Institute of Electronics |
公開日期: | 1-一月-2006 |
摘要: | This article presents a novel fabrication process to enhance the operational performance and reliability of electrothermal microactuators. Carbon nanotubes (CNTs) (outer diameter: 10-20 nm, innerdiameter: 5-10 nm, length: 0.5-200 mu m) are incorporated in an electrolytic nickel deposition process in which a well-dispersed Ni-CNTs colloidal solution is made by a special acid oxidative method to synthesis a Ni-CNTs nanocomposite for device fabrication. Measurement results show that the microactuator plated with CNTs (0.028 g/L) needs the power requirement less 95% than the pure nickel device at the same output displacement of 3 mu m. The performance improvement of the electrothermal microactuator made of the nanocomposite, including device strength and power efficiency, has shown to be similar to the Ni-diamond composites (L. N. Tsai, G. R. Shen, Y. T. Cheng, and W. S. Hsu, The 54th Electronic Components and Technology Conference, June 2004, pp. 472-476)). In addition, the E/p ratio of the Ni-CNTs composite can be enhanced to 1.47 times higher than that of pure nickel, which is a fascinating result for resonant device fabrication. (c) 2006 American Vacuum Society. |
URI: | http://dx.doi.org/10.1116/1.2161222 http://hdl.handle.net/11536/12835 |
ISSN: | 1071-1023 |
DOI: | 10.1116/1.2161222 |
期刊: | JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B |
Volume: | 24 |
Issue: | 1 |
起始頁: | 205 |
結束頁: | 210 |
顯示於類別: | 會議論文 |