標題: | Characterization of Silicon Photonics Modulator Integration and High Efficiency Testing Platform |
作者: | Chen, Shang-Chun Wun, Sin-Jhu Hsu, Chih-Hsiang Lin, Chen-Yu Zhang, Jie Ku, Kai-Ning Chang, Po-Chih Wang, Chung-Chih Chen, Wei-Yen Lee, Tai-Hsin Huang, Chien-Ying Chen, Ting-Hui Lee, Ming-Chang Lin, Chien-Chung 光電系統研究所 Institute of Photonic System |
關鍵字: | silicon photonics;modulator;wafer level measurement |
公開日期: | 1-一月-2019 |
摘要: | We successfully establish a silicon photonics device manufacturing and testing platform in 200mm SOI wafer. We integrate modulator and driver chip to show 30Gbis PAM4 capability. A fully-automatic wafer level characterization process is built up for all optical devices in surface coupling method. |
URI: | http://hdl.handle.net/11536/155281 |
ISBN: | 978-1-7281-0905-3 |
ISSN: | 1949-2081 |
期刊: | 2019 IEEE 16TH INTERNATIONAL CONFERENCE ON GROUP IV PHOTONICS (GFP 2019) |
起始頁: | 0 |
結束頁: | 0 |
顯示於類別: | 會議論文 |