標題: Characterization of Silicon Photonics Modulator Integration and High Efficiency Testing Platform
作者: Chen, Shang-Chun
Wun, Sin-Jhu
Hsu, Chih-Hsiang
Lin, Chen-Yu
Zhang, Jie
Ku, Kai-Ning
Chang, Po-Chih
Wang, Chung-Chih
Chen, Wei-Yen
Lee, Tai-Hsin
Huang, Chien-Ying
Chen, Ting-Hui
Lee, Ming-Chang
Lin, Chien-Chung
光電系統研究所
Institute of Photonic System
關鍵字: silicon photonics;modulator;wafer level measurement
公開日期: 1-一月-2019
摘要: We successfully establish a silicon photonics device manufacturing and testing platform in 200mm SOI wafer. We integrate modulator and driver chip to show 30Gbis PAM4 capability. A fully-automatic wafer level characterization process is built up for all optical devices in surface coupling method.
URI: http://hdl.handle.net/11536/155281
ISBN: 978-1-7281-0905-3
ISSN: 1949-2081
期刊: 2019 IEEE 16TH INTERNATIONAL CONFERENCE ON GROUP IV PHOTONICS (GFP 2019)
起始頁: 0
結束頁: 0
顯示於類別:會議論文