Characterization of Silicon Photonics Modulator Integration and High Efficiency Testing Platform

Title:	Characterization of Silicon Photonics Modulator Integration and High Efficiency Testing Platform
Authors:	Chen, Shang-Chun Wun, Sin-Jhu Hsu, Chih-Hsiang Lin, Chen-Yu Zhang, Jie Ku, Kai-Ning Chang, Po-Chih Wang, Chung-Chih Chen, Wei-Yen Lee, Tai-Hsin Huang, Chien-Ying Chen, Ting-Hui Lee, Ming-Chang Lin, Chien-Chung 光電系統研究所 Institute of Photonic System
Keywords:	silicon photonics;modulator;wafer level measurement
Issue Date:	1-Jan-2019
Abstract:	We successfully establish a silicon photonics device manufacturing and testing platform in 200mm SOI wafer. We integrate modulator and driver chip to show 30Gbis PAM4 capability. A fully-automatic wafer level characterization process is built up for all optical devices in surface coupling method.
URI:	http://hdl.handle.net/11536/155281
ISBN:	978-1-7281-0905-3
ISSN:	1949-2081
Journal:	2019 IEEE 16TH INTERNATIONAL CONFERENCE ON GROUP IV PHOTONICS (GFP 2019)
Begin Page:	0
End Page:	0
Appears in Collections:	Conferences Paper