标题: | Formation of nano-crystalline Si quantum dots in ZnO thin-films using a ZnO/Si multilayer structure |
作者: | Kuo, Kuang-Yang Hsu, Shu-Wei Chuang, Wen-Ling Lee, Po-Tsung 光电工程学系 Department of Photonics |
关键字: | Si quantum dot;ZnO;Sputtering;Thin-films |
公开日期: | 1-二月-2012 |
摘要: | In this study, we propose to fabricate ZnO thin-films with nano-crystalline Si (nc-Si) quantum dots (QDs) embedded using a ZnO/Si multilayer structure by radio-frequency (RF) magnetron sputtering method. Our results show that a high Si sputtering power (P-Si) can assist the formation of self-aggregated Si nano-clusters during deposition, which is helpful for the crystallization of nc-Si QDs and ZnO matrix during annealing. Great crystallinity and highly uniform size of nc-Si QDs are obtained for P-Si of 110 W. We experimentally demonstrate the formation of nc-Si QDs embedded in crystalline ZnO thin-films, which has a great potential for various electro-optical device applications. (C) 2011 Elsevier B.V. All rights reserved. |
URI: | http://dx.doi.org/10.1016/j.matlet.2011.11.022 http://hdl.handle.net/11536/15661 |
ISSN: | 0167-577X |
DOI: | 10.1016/j.matlet.2011.11.022 |
期刊: | MATERIALS LETTERS |
Volume: | 68 |
Issue: | |
起始页: | 463 |
结束页: | 465 |
显示于类别: | Articles |
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