标题: Evidence for the Fourfold-Valley Confinement Electron Piezo-Effective-Mass Coefficient in Inversion Layers of < 110 > Uniaxial-Tensile-Strained (001) nMOSFETs
作者: Chen, Ming-Jer
Lee, Wei-Han
电子工程学系及电子研究所
Department of Electronics Engineering and Institute of Electronics
关键字: Band structure;effective mass;mechanical stress;metal-oxide-semiconductor field-effect transistors (MOSFETs);mobility;model;simulation;strain;tunneling
公开日期: 1-六月-2012
摘要: We have recently experimentally extracted the piezo-effective-mass coefficients of 2-D electrons via the gate tunneling current of (001) n-channel metal-oxide-semiconductor field-effect transistors under < 110 > uniaxial compressive stress. The results pointed to the existence of a piezo-effective-mass coefficient around the fourfold conduction-band valley in the out-of-plane (quantum confinement) direction. To strengthen this further, here, we provide extra evidence. First, explicit guidelines are drawn to distinguish all the piezo-effective-mass coefficients. Then, a self-consistent strain quantum simulation is executed to fit literature data of both the mobility enhancement and gate current suppression in the uniaxial tensile stress situation. It is found that neglecting the fourfold-valley out-of-plane piezo-effective-mass coefficient, as in existing band structure calculations, only leads to a poor fitting.
URI: http://hdl.handle.net/11536/16495
ISSN: 0741-3106
期刊: IEEE ELECTRON DEVICE LETTERS
Volume: 33
Issue: 6
结束页: 755
显示于类别:Articles


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