A SPICE-compatible mobility function for excimer laser annealed LTPS TFT analog circuit simulation

Abstract

In this paper, we present a calibrated SPICE-compatible mobility function for modeling and simulation of the excimer leaser annealed lower temperature polycrystalline silicon (LTPS) thin film transistors (TFTs). Compared with the conventional mobility function in the well-known RPI TFT equivalent circuit model, the proposed mobility function exhibits accurate results in terms of several DC characteristics. A physical-based model parameter extraction procedure is also proposed for studying the RPI TFT model with the proposed mobility. The model implemented in a circuit simulator for LTPS TFT analog circuit simulation shows reasonable outputs and encounters no any convergence problems.